The inspection and metrology equipment platform has independently developed products based on a micro- and nano-scale three-dimensional surface feature measurement system using white light interferometric microscopy.

The main technologies include broad-spectrum uniform microscopic illumination, white light interferometric microscopy, white-light phase-shifting interferometry for three-dimensional structure reconstruction, and a stable, vibration-isolated platform.

The PSH Metrology system supports the measurement of Photo Spacer Height (PSH), Critical Dimension (CD), Overlay, and Angle.